Specification | |
Top Functional Layer | |
Diameter | 3, 4, 6 inches |
Orientation | Y-42, Y-46.3, Z, etc. |
Material | LiTaO3 |
Thickness | 300-900 nm |
Isolation Layer | |
Material | SiO2 |
Thickness | 300-4000nm |
Substrate | |
Material | Si |
Thickness | 400-500μm |
Modules or Types:
Single-crystal Lithium Tantalate Thin Film |
SiO2 |
Silicon Substrates |