click me!

SrTiO3 Substrates

  • Twinless crystal structure, excellent physical and good mechanical properties
  • Maximum diameter: 35mm, typical thickness 0.5 /1.0mm
  • Stocked and custom SrTiO3 substrate
  • Surface Roughness: Ra < 0.5nm
  • Clean package: class1000 clean room and class 100 bags
  • Other applications: epitaxial growth of HTSC and oxide thin films (e.g., YBCO, Bi-system, La-system, etc.), Special optical windows, high-quality sputtering, Magnet Sputtering, Pulsed Laser Deposition (PLD)
Inquire for custom product  
Code Size Thickness Orientation Surface Finish Unit Price Delivery Cart
642-001 5x5mm 0.5mm <100> SSP Inquire 2 weeks
642-002 5x5mm 0.5mm <100> DSP Inquire 2 weeks
642-003 5x5mm 0.5mm <110> SSP Inquire 2 weeks
642-004 5x5mm 0.5mm <111> SSP Inquire 2 weeks
642-005 10x10mm 0.5mm <100> SSP Inquire 2 weeks
642-006 10x10mm 0.5mm <100> DSP Inquire 2 weeks
642-007 10x10mm 0.5mm <110> SSP Inquire 2 weeks
642-008 10x10mm 0.5mm <111> SSP Inquire 2 weeks
642-009 Φ12.7mm 0.5mm <100> SSP Inquire 2 weeks
642-010 Φ12.7mm 0.5mm <100> DSP Inquire 2 weeks
642-011 Φ20mm 0.5mm <100> SSP Inquire 2 weeks
642-012 Φ20mm 0.5mm <100> DSP Inquire 2 weeks
642-013 Φ25.4mm 0.5mm <100> SSP Inquire 2 weeks
642-014 φ25.4mm 0.5mm <100> DSP Inquire 2 weeks

Strontium Titanate or SrTiO3 (STO) single crystal has a twinless crystal structure and very good physical and mechanical properties for film growth. STO provides a good lattice match to most materials with Perovskite structure. It is an excellent substrate for epitaxial growth of HTSC (High-Temperature Superconductor) and various oxide thin films. Its lattice constant (3.905Å) matches well with the common high TC superconductive material YBCO (lattice constant 3.88 Å). STO is also a suitable platform for other high TC films such as Bi-system, La-system, and others.  SrTiO3 single crystal has been utilized for special optical windows and as a high-quality sputtering target as well. It can also accommodate diverse film growth technologies such as Magnet Sputtering, Pulsed Laser Deposition (PLD), Vaporization, MOCVD, CVD, laser MBE, etc. Films made with these materials and technologies on SrTiO3 wafers exhibit excellent performance.

Hangzhou Shalom EO provides stocked standard SrTiO3 (or STO) wafers and customized wafers.

Common Specifications:

Materials SrTiO3 crystals Orientations <100>,<110>,<111>
Orientation Error ±0.5° Maximum Diameter 35mm
Typical Thickness 0.5mm, 1.0mm Thickness Tolerance ±0.05mm
Size Tolerance ±0.1mm Surface Finish SSP or DSP
Roughness Ra<0.5nm Cleanness and Package class 1000 clean room, class 100 bags

STO Basic Properties:

Crystal Structure M6 Growth Method Blaze method
Unit Cell Constant a=3.905Å Twin Structure Twin free
Color Colorless to light yellow Melt Point(℃) 2080
Density(g/cm3 5.175(g/cm3 Hardness 6-6.5(mohs)
Thermal Expansion(/℃) 9.4×10-6 Thermal Conductivity 120 milliwatts/cm °C at 100 °C
Dielectric Constants ε=300 Chemical Stability Insoluble in water
Tangent Loss ~5×10-4(300k) ~3×10-4(77k) Specific Resistivity > 107Ohm/cm
Transmission Range 0.4 to 6 µm Refraction Index nc = 2.380 nd = 2.409 nf = 2.488
Dispersion (nf - nc) = 0.108

Curves:

1)Typical X-Ray Diffraction (XRD) Curve of SrTiO3 Crystals Substrates




2) Typical Surface Roughness of SrTiO3 substrate <100> measured by Atomic Force Microscope (AFM) in 5μm x 5μm Scale







SrTiO3 Wafers 10x10x0.5mm <111> SSP

SrTiO3 Wafers 10x10x0.5mm <111> SSP

SrTiO3 Wafers Φ25.4mmx0.5mm <100> DSP

SrTiO3 Wafers Φ25.4mmx0.5mm <100> DSP

SrTiO3 Wafers 5x5x0.5mm <110> SSP

SrTiO3 Wafers 5x5x0.5mm <110> SSP